Direct fabrication of deep x-ray lithography masks by micromechanical milling
Author:
Publisher
Elsevier BV
Subject
General Engineering
Reference12 articles.
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2. Micron-scale machining;Vasile;Prec Eng,1996
3. Metrology and quantification of micromilled x-ray masks and exposures;Friedrich;SPIE,1997
4. Development of the micromilling process for high aspect ratio microstructures;Friedrich;J MEMS,1996
5. Multi-exposure capability development for deep x-ray lithography for MEMS;Khan Malek;SPIE,1996
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