Spectroscopic measurement of kinetic energy of sputtered boron in electron cyclotron resonance plasma-Reference-Cited by-同舟云学术

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Spectroscopic measurement of kinetic energy of sputtered boron in electron cyclotron resonance plasma

Published:1997-02 Issue: Volume:241-243 Page:1122-1126
ISSN:0022-3115
Container-title:Journal of Nuclear Materials
language:en
Short-container-title:Journal of Nuclear Materials

Author:

Ito Yoshifumi,Nakano Noboru,Yoshidome Tutomu,Isobe Michiro,Nishikawa Masahiro

Publisher

Elsevier BV

Subject

Nuclear Energy and Engineering,General Materials Science,Nuclear and High Energy Physics

Reference9 articles.

1. Energy Distribution of Sputtered Cu Atoms

2. Surface normal velocity distribution of sputtered Zr-atoms for light-ion irradiation

3. Energy distributions of neutral atoms sputtered from Cu, V and Nb under different bombardment and ejection angles

4. Diagnostics of sputtering processes of carbon and carbides by laser-induced fluorescence spectroscopy in the VUV at 166 nm

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. LIF Velocity Measurement of Sputtered Boron Atoms from Boron Nitride Target;46th AIAA/ASME/SAE/ASEE Joint Propulsion Conference & Exhibit;2010-07-25

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