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2. Thin film crystal growth by sputtering;Greene,1980
3. epitaxial crystal growth by sputter deposition: applications to semiconductors. Part 2;Greene;CRC Crit. Rev. Solid State Mater. Sci.,1984
4. Ion/surface interactions during film growth from the vapor phase;Greene,1989
5. Low-energy ion/surface interactions during film growth from the vapor phase: effects on nucleation and growth kinetics, defect structure and elemental incorporation probabilities;Greene,1990