Multiscale simulations of silicon nanoindentation
Author:
Publisher
Elsevier BV
Subject
Metals and Alloys,Polymers and Plastics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference31 articles.
1. Micro/nanomechanical characterization of ceramic films for microdevices
2. Characterizing the hardness and modulus of thin films using a mechanical properties microprobe
3. Phase transition in diamond-structure crystals during hardness measurements
4. Amorphization and Conductivity of Silicon and Germanium Induced by Indentation
5. The mechanical behavior of silicon during small-scale indentation
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