1. A chemical microanalysis system as a microfluid system demonstrator;Richter,1997
2. An integrated MEMS system for turbulent boundary layer Control;Tsao,1997
3. A surface micromachined silicon accelerometer with on-chip detection circuitry;Kuehnel;Sensors and Actuators A,1994
4. Embedded micromechanical devices for the monolithic integration of MEMS with CMOS IEDM;Smith,1995
5. A merged MEMS-CMOS process using silicon water bonding IEDM;Parameswaran,1995