A method of detecting the nature of IC defects-Reference-Cited by-同舟云学术

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A method of detecting the nature of IC defects

Published:1988-05 Issue:3 Volume:19 Page:41-45
ISSN:0026-2692
Container-title:Microelectronics Journal
language:en
Short-container-title:Microelectronics Journal

Author:

Patyra M.J.,Zabrodzki J.

Publisher

Elsevier BV

Subject

General Engineering

Reference10 articles.

1. Modelling of defects in integrated circuit photolithographic patterns;Stapper;IBM J. Res. Dev.,1984

2. The defect sensitivity effect of memory chips;Stapper;IEEE JSSC,1986

3. Modelling of integrated circuit defect sensitivities;Stapper;IBM J. Res. Dev.,1983

4. Integrated circuit yield forecast;Stapper;IEEE JSSC,1983

5. Modelling of the critical area in yield forecast;Ferris-Prabhu;IEEE JSSC,1985

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