Introduction in space technologies, processing and applications of ULSI/WSI/3D-WSI on functional 3D nano- and optoelectronic elements-Reference-Cited by-同舟云学术

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Introduction in space technologies, processing and applications of ULSI/WSI/3D-WSI on functional 3D nano- and optoelectronic elements

Published:2002-11 Issue:11 Volume:33 Page:1011-1019
ISSN:0026-2692
Container-title:Microelectronics Journal
language:en
Short-container-title:Microelectronics Journal

Author:

Bubennikov Alexandre N

Publisher

Elsevier BV

Subject

General Engineering

Reference14 articles.

1. Special issue on quantum devices and their application, Proceedings of IEEE, 87(4) (1999).

2. Nanoscale CMOS;Wong;Proceedings of IEEE,1999

3. The future of microelectronics;Chatterjee;Proceedings of IEEE,1998

4. Silicon nanoelectronics for 21st century;Hu;Nanotechnology,1999

5. New Technonomics trends and concepts of manufacturing for competitive deep-submicron ULSI and WSI;Bubennikov;Proceedings of the ISSM'97, San Francisco,1997

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Amorphization of Si (100) under O+ implantation studied by spectroscopic ellipsometry;Solid State Communications;2005-03

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