MOSFET performance enhancement by improved SOS material processes-Reference-Cited by-同舟云学术

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MOSFET performance enhancement by improved SOS material processes

Published:1984-09 Issue:5 Volume:15 Page:48-61
ISSN:0026-2692
Container-title:Microelectronics Journal
language:en
Short-container-title:Microelectronics Journal

Author:

Maddox R.L.,Lin A.L.,Golecki I.,Glass H.L.

Publisher

Elsevier BV

Subject

General Engineering

Reference25 articles.

1. Single‐Crystal Silicon on a Sapphire Substrate

2. Cross‐sectional electron microscopy of silicon on sapphire

3. The Current Status of Silicon On Sapphire and other Heteroepitaxial Silicon on Insulator Technologies;Golecki,1984

4. Improvement of SOS Device Performance by Solid-Phase Epitaxy

5. 23rd Electronic Material, Conference;Yoshii,1981

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Advanced Silicon on Insulator Materials: Processing, Characterization and Devices;Semiconductor Silicon;1989

2. Silicon films on sapphire;Reports on Progress in Physics;1987-03-01

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