Boron accumulation at epi-substrate silicon interface during epitaxial growth
-
Published:1992-10
Issue:1
Volume:15
Page:32-36
-
ISSN:0921-5107
-
Container-title:Materials Science and Engineering: B
-
language:en
-
Short-container-title:Materials Science and Engineering: B
Author:
Pivac B.,Borghesi A.,Geddo M.,Sassella A.,Pedrotti M.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference21 articles.
1. ULSI Science and Technology—1987;Endo,1987
2. Semiconductor Silicon 1977;Srinivasan,1977
3. Chemical Vapor Deposition 1979;Srinivasan,1979
4. Autodoping Phenomena in Epitaxial Silicon