Electrolyte for electrochemical C-V profiling of InP- and GaAs-based structures

Author:

Faur Maria,Faur Mircea,Flood D.J.,Goradia M.

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Phosphorus vacancy mediated complex diffusion mechanism of Zn in InP;Materials Letters;2023-03

2. Chemical beam epitaxial growth of AlInAs and investigations of electrolytes for ECV profiling;Journal of Crystal Growth;2004-08

3. Study of polish material removal by electrochemical method on different compound semiconductors;Inorganic Materials;2000-10

4. A contribution to electrochemical C-V measurements on GaAs/GaAlAs multilayer structures;ASDAM '98. Conference Proceedings. Second International Conference on Advanced Semiconductor Devices and Microsystems (Cat. No.98EX172)

5. On the development of an electrolyte for ECV profiling of AlInAs;Conference Proceedings. 2000 International Conference on Indium Phosphide and Related Materials (Cat. No.00CH37107)

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