Author:
Li J.L.,O'Keefe T.J.,James W.J.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference30 articles.
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2. Plasma Chemistry in Electrical Discharge;McTaggart,1967
3. Techniques and Applications of Plasma Chemistry,1974
4. Thin Film Processes;Hollahan,1978
5. Plasma Deposition of Inorganic Thin Films
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