The application of energetic ion beams to thin metallic films

Author:

Hues Steven M.

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference40 articles.

1. Secondary Ion Mass Spectrometry;Benninghoven,1987

2. Practical Surface Analysis by Auger and X-ray Photoelectron Spectroscopy,1983

3. Fundamentals of Surface and Thin Films Analysis;Feldman,1986

4. Sputtering by Particle Bombardment I;Sigmund,1981

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1. Measurement of nanomechanical properties of metals using the atomic force microscope;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1994-05

2. Ion-beam deposition of Zr-Al multilayers and their structural properties;Surface and Coatings Technology;1992-11-16

3. Ion-beam deposition of Zr−Al multilayers and their structural properties;Surface and Coatings Technology;1992-11

4. Ion-beam deposition of Zr–Al multilayers and their structural properties;Metallurgical Coatings and Thin Films 1992;1992

5. Structural, elastic and transport properties of Ag/Al multilayer thin films prepared by ion-beam sputtering;Surface and Coatings Technology;1991-12

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