Mechanical and tribological properties of diamond-like carbon films prepared on steel by ECR-CVD process-Reference-Cited by-同舟云学术

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Mechanical and tribological properties of diamond-like carbon films prepared on steel by ECR-CVD process

Published:2001-09 Issue:9-10 Volume:10 Page:1855-1861
ISSN:0925-9635
Container-title:Diamond and Related Materials
language:en
Short-container-title:Diamond and Related Materials

Author:

Li K.Y.,Zhou Z.F.,Chan C.Y.,Bello I.,Lee C.S.,Lee S.T.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Materials Chemistry,Mechanical Engineering,General Chemistry,Electronic, Optical and Magnetic Materials

Reference31 articles.

1. Diamond-like carbon: state of the art

2. Diamond-like carbon — present status

3. Comparison of diamond-like carbon film deposition by electron cyclotron resonance with benzene and methane

4. A combined MW/ECR-PACVD apparatus for the deposition of diamond and other hard coatings

5. Rusli, S.F. Yoon, H. Yang, Q. Zhang, J. Ahn, Y.L. Fu, J. Vac. Sci. Technol. A 162 (1998) 572.

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