Author:
Kohn E.,Adamschik M.,Schmid P.,Ertl S.,Flöter A.
Subject
Electrical and Electronic Engineering,Materials Chemistry,Mechanical Engineering,General Chemistry,Electronic, Optical and Magnetic Materials
Reference32 articles.
1. An electrostatic lower stator axial-gap polysilicon wobble motor. II. Fabrication and performance
2. Wavelength add-drop switching using tilting micromirrors
3. Micromechanical Mixer-Filters; IEDM 98, Digest;Wong,1998
4. Intricate Mechanisms-on-a-Chip Enabled by 5-Level Surface Micromachining; Transducers 99, Digest;Rodgers,1999
5. Review on Diamond Based Piezoresistive Sensors; ISIE Proceedings;Werner,1998
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