Comparison of deposition methods for ultra thin DLC overcoat film for MR head-Reference-Cited by-同舟云学术

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Comparison of deposition methods for ultra thin DLC overcoat film for MR head

Published:2001-03 Issue:3-7 Volume:10 Page:1017-1023
ISSN:0925-9635
Container-title:Diamond and Related Materials
language:en
Short-container-title:Diamond and Related Materials

Author:

Akita N,Konishi Y,Ogura S,Imamura M,Hu Y.H,Shi X

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Materials Chemistry,Mechanical Engineering,General Chemistry,Electronic, Optical and Magnetic Materials

Reference12 articles.

1. Chemical, mechanical and tribological characterization of ultra-thin and hard amorphous carbon coatings as thin as 3.5 nm: recent developments

2. Diamond-like carbon films deposited using a broad, uniform ion beam from an RF inductively coupled CH4-plasma source

3. Reactive Ion Beam Etching Using a Broad Beam ECR Ion Source

4. Deposition of Diamondlike Carbon Films Using Electron Cyclotron Resonance Plasma Chemical Vapor Deposition from Ethylene Gas

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