DLC Films deposited by bipolar pulsed DC PACVD-Reference-Cited by-同舟云学术

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DLC Films deposited by bipolar pulsed DC PACVD

Published:1998-02 Issue:2-5 Volume:7 Page:459-462
ISSN:0925-9635
Container-title:Diamond and Related Materials
language:en
Short-container-title:Diamond and Related Materials

Author:

Michler T.,Grischke M.,Traus I.,Bewilogua K.,Dimigen H.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Materials Chemistry,Mechanical Engineering,General Chemistry,Electronic, Optical and Magnetic Materials

Reference11 articles.

1. Engineering applications for diamond-like carbon

2. Plasma-booster-assisted hydrogenated W-C coatings

3. Tribological properties and characterization of diamond-like carbon coatings with silicon prepared by plasma-assisted chemical vapour deposition

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