Effects of thermal annealing on amorphous carbon nitride films by r.f. PECVD-Reference-Cited by-同舟云学术

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Effects of thermal annealing on amorphous carbon nitride films by r.f. PECVD

Published:2002-09 Issue:9 Volume:11 Page:1633-1637
ISSN:0925-9635
Container-title:Diamond and Related Materials
language:en
Short-container-title:Diamond and Related Materials

Author:

Yu Guo-Qing,Lee Seung-Hoon,Lee Jung-Joong

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Materials Chemistry,Mechanical Engineering,General Chemistry,Electronic, Optical and Magnetic Materials

Reference26 articles.

1. Prediction of New Low Compressibility Solids

2. Structural properties and electronic structure of low-compressibility materials: β-Si3N4and hypothetical β-C3N4

3. Observation of crystallineC3N4

4. Stoichiometric growth of polycrystalline C3N4 thin films

5. Properties of carbon nitride films with composition ratioC/N=0.5–3.0 prepared by the ion and vapor deposition method

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