Dielectric properties of phosphorus nitride films
Author:
Publisher
Elsevier BV
Subject
Condensed Matter Physics,General Materials Science,General Chemistry
Reference9 articles.
1. The Structural Chemistry of Phosphorus;Corbridge,1974
2. Dissociation energy of PN and other thermodynamic properties for the vaporization of P3N5
3. Gaseous phosphorus compounds. III. Mass spectrometric study of the reaction between diatomic nitrogen and phosphorus vapor and dissociation energy of phosphorus mononitride and diatomic phosphorus
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1. Carbon and Oxygen-Doped Phosphorus Nitride (COPN) for Continuous Selective and Stable H2O2 Production;ACS Catalysis;2023-10-27
2. Experiment-Driven Modeling of Crystalline Phosphorus Nitride P3 N5 : Wide-Ranging Implications from a Unique Structure;Chemistry - A European Journal;2016-06-06
3. III–V surface plasma nitridation: A challenge for III–V nitride epigrowth;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1999-07
4. Plasma-enhanced chemical vapor deposition of phosphorus nitride thin films: Auger spectroscopy characterization;Applied Surface Science;1992-01
5. Chemical Vapor Deposition Under Plasma Conditions;Film Deposition by Plasma Techniques;1992
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