Local annealing of complex mechanical devices: a new approach for developing monolithic micro-devices-Reference-Cited by-同舟云学术

Local annealing of complex mechanical devices: a new approach for developing monolithic micro-devices

Published:1999-12 Issue: Volume:273-275 Page:795-798
ISSN:0921-5093
Container-title:Materials Science and Engineering: A
language:en
Short-container-title:Materials Science and Engineering: A

Author:

Bellouard Y,Lehnert T,Bidaux J.-E,Sidler T,Clavel R,Gotthardt R

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference3 articles.

1. A concept for monolithic shape memory alloys micro-devices;Bellouard;J. Phys. (France) IV,1997

2. Y. Bellouard, R. Clavel, R.Gotthardt, T.Sidler, J.-E. Bidaux, A New Concept of Monolithic Shape Memory Alloy Micro-Devices Used in Micro-Robotics, Actuators, Bremen, Germany, June 17–19, 1998, pp. 499–502.

3. K. Kuribayashi, S. Shimizu, Direct Joule’s Heat Crystallization Treatment for TiNi Thin Film Micro-Actuator, Actuators, Bremen, Germany, June 17–19, 1998, pp. 465–468.

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