RF heating of the conductor film on silicon substrate for thin film formation
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference16 articles.
1. Induction Heating Handbook;Davies,1979
2. Microwave Heating for VLSI Processing
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4. Eddy current losses at cryogenic temperatures
5. Eddy current loss calculation in thin rectangular plates at cryogenic temperatures and its experimental verification
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