Effects of bombardment by high energy gas cluster ion beams

Author:

Takeuchi D.,Matsuo J.,Kitai A.,Yamada I.

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference14 articles.

1. A method and apparatus for surface modification by gas-cluster ion impact

2. Proc. ICSSPIC-7;Matuso,1996

3. Proc. ICSSPIC-7;Akizuki,1996

4. Molecular-dynamics simulations of collisions between energetic clusters of atoms and metal substrates

5. Laser and Ion Beam Modification of Materials;Insepov,1994

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1. Reactive etching by ClF3–Ar neutral cluster beam with scanning;Japanese Journal of Applied Physics;2016-05-09

2. Ion-induced damage evaluation with Ar cluster ion beams;Surface and Interface Analysis;2012-06-05

3. Evaluation of damage depth on arginine films with molecular depth profiling by Ar cluster ion beam;Transactions of the Materials Research Society of Japan;2011

4. Nano-processing with gas cluster ion beams;Surface and Coatings Technology;2009-06

5. High-Speed Nanoprocessing with Cluster Ion Beams;Transactions of the Materials Research Society of Japan;2008

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