Correlating point defects with mechanical properties in nanocrystalline TiN thin films
Author:
Funder
National Natural Science Foundation of China
Austrian Science Fund
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Reference59 articles.
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4. Nanoscale TiN metal gate technology for CMOS integration;Lemme;Microelectron. Eng.,2006
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