Experimental and numerical study on the viscoelastic property of polycarbonate near glass transition temperature for micro thermal imprint process
Author:
Publisher
Elsevier BV
Subject
Applied Mathematics,General Mathematics
Reference11 articles.
1. Imprint of sub-25nm vias and trnches in polymers;Chou;Appl Phys Lett,1995
2. Continuous roll to roll nanoimprinting of inherently conducting polyaniline;Makela;Microelectron Eng,2007
3. Applications of micro hot embossing for optical switch formation;Shan;Sens Actuators, A Phys,2005
4. Hot embossing of micrographic elements in polypropylene;Leech;Microelectron Eng,2007
5. Hot embossing for micropatterned cell substrates;Charest;Biomaterials,2004
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