Rapid thermal annealing of Ti-rich TiNi thin films: A new approach to fabricate patterned shape memory thin films
Author:
Publisher
Elsevier BV
Subject
Applied Mathematics,General Mathematics
Reference34 articles.
1. Vacuum-deposited TiNi shape memory film: characterization and applications in micro-devices;Johnson;J Micromech Microeng,1991
2. Thin film shape memory alloy rnicroactuators;Krulevitch;J Microelectromech Syst,1996
3. Thin-film shape-memory alloy actuated micropumps;Benard;J Microelectromech Syst,1998
4. Shape memory microvalves based on thin films or rolled sheets;Kohl;Mater Sci Eng A,1999
5. Fabrication of TiNi shape memory micropump;Makino;Sensors Actuat A,2001
Cited by 11 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Thermal cycling at constant stress for thin films over a wide temperature range: Design and fabrication of a specific device for the study of microactuators;Review of Scientific Instruments;2023-04-01
2. Extending Fatigue Life of NiTiHf Shape Memory Alloy Wires Through Rapid Thermal Annealing;Shape Memory and Superelasticity;2022-12
3. Controlling Microstructure and Extending Fatigue Life by Flash Annealing Ni-lean NiTi-10 at.% Hf High Temperature Shape Memory Alloy;AIAA SCITECH 2022 Forum;2022-01-03
4. Crystal structure and bonding characteristics of transformation products of bcc β in Ti-Mo alloys;Journal of Alloys and Compounds;2017-05
5. Crystallization of nanoscale NiTi alloy thin films using rapid thermal annealing;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2016-11
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3