Silicon-carbide-based MEMS for gas detection applications-Reference-Cited by-同舟云学术

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Silicon-carbide-based MEMS for gas detection applications

Published:2024-03 Issue: Volume:171 Page:107986
ISSN:1369-8001
Container-title:Materials Science in Semiconductor Processing
language:en
Short-container-title:Materials Science in Semiconductor Processing

Author:

Michaud Jean-François^ORCID,Portail Marc,Alquier Daniel,Certon Dominique,Dufour Isabelle

Funder

Agence Nationale de la Recherche

French Government Ministry of Education Research and Technology

Agence Nationale pour la Gestion des Déchets Radioactifs

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference28 articles.

1. Silicon carbide as a new MEMS technology;Sarro;Sensor. Actuator.,2000

2. Determination of Young's moduli of 3C (110) single-crystal and (111) polycrystalline silicon carbide from operating frequencies;Chang;J. Mater. Sci.,2008

3. Fabrication of monocrystalline 3C-SiC resonators for MHz frequency sensors applications;Placidi;Sensor. Actuator. B,2008

4. 3C-SiC: from electronic to MEMS devices;Michaud,2015

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