Substrate-free silicon nitride films for metamaterial absorbers designed with Lorentz quadratic model-Reference-Cited by-同舟云学术

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Substrate-free silicon nitride films for metamaterial absorbers designed with Lorentz quadratic model

Published:2024-01 Issue: Volume:169 Page:107868
ISSN:1369-8001
Container-title:Materials Science in Semiconductor Processing
language:en
Short-container-title:Materials Science in Semiconductor Processing

Author:

Li Zhigang,Jia Jiarui,Jiang Wenjing,Ou Wen,Wang Bo,Peng Xubiao,Wu Hao,Zhao Qing

Funder

National Key Research and Development Program of China

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference49 articles.

1. Non-local reconfigurable sparse metasurface: efficient near-field and far-field wavefront manipulations;Popov;Adv. Opt. Mater.,2021

2. Recent advances in the development of materials for terahertz metamaterial sensing;Shen;Adv. Opt. Mater.,2022

3. Silicon nitride deposited by laser assisted plasma enhanced chemical vapor deposition for next generation organic electronic devices;Kim;Appl. Surf. Sci.,2021

4. Wafer-level mechanical characterization of silicon nitride MEMS;Kaushik;J. Microelectromech. Syst.,2005

5. Low atomic number silicon nitride films for transmission electron microscopy;Fu;Mater. Sci. Semicond. Process.,2019

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