A novel vacuum epitaxial lift-off (VELO) process for separation of hard GaAs substrate/carrier systems for a more green semiconductor LED production

Author:

Englhard M.,Reuters B.,Michaelis F.B.,Behringer M.,Sundgren P.,Klemp C.,Skibitzki O.,Schroeder T.

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference14 articles.

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3. Reuse of GaAs substrates for epitaxial lift-off by employing protection layers;Lee;J. Appl. Phys.,2012

4. J.S. Ward, T. Remo, K. Horowitz, M. Woodhouse, B. Sopori, K. VanSant, P. Basore, Techno-economic analysis of three different substrate removal and reuse strategies for III-V solar cells, Progress in Photovoltaics: Research and Applications.

5. High efficiency GaAs thin film solar cells by peeled film technology;Konagai;J. Cryst. Growth,1978

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