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Design of capacitance based on interdigitated electrode for BioMEMS sensor application

  • Published:2019-10 Issue: Volume:101 Page:206-213
  • ISSN:1369-8001
  • Container-title:Materials Science in Semiconductor Processing
  • language:en
  • Short-container-title:Materials Science in Semiconductor Processing

Author:

Sathya S.,Muruganand S.,Manikandan N.,Karuppasamy K.

Funder

Department of Science and Technology

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference21 articles.

1. Simulations of interdigitated electrode interactions with gold nanoparticles for impedance-based biosensing applications;MacKay;Sensors,2015

2. Open-loop versus closed-loop control of MEMS devices: choices and issues;Borovic;J. Micromech. Microeng.,2005

3. Capacitance measurements of antibody-antigen interactions in a flow system;Berggren;Anal. Chem.,1997

4. Capacitive biosensors;Berggren;Electroanalysis,2001

5. Fabrication, characterization and modelling of electrostatic micro-generators;Hoffmann;J. Micromech. Microeng.,2009
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