1. Fabrication and characterization of single-crystal silicon carbide MEMS;Okojie,2002
2. The preparation of single-crystal 4H-SiC film by pulsed XeCl laser deposition;Wang;Thin Solid Films,1999
3. Maley S, Romanosky R, Chen Z.-Y. Sensors and controls workshop: summary report, DOE/NETL, November 2001.
4. A. Atwell, E. Hailu, C. Li, J.S. Duster, K. Kornegay, Integrated MEMS pressure sensor in 6H-SiC, NNUN Abstracts, Mechanical & MEMS Devices, 2002. p. 69.
5. Ned A, Okojie RS, Kurtz AD. 6H-SiC pressure sensor operation at 600°C. In: Transactions of the fourth international conference on HITEC, Albuquerque, NM, USA, 1998. p. 257.