Peculiar properties of preferential sputtering of PbTe, SnTe, and GeTe by Ar+ ion plasma-Reference-Cited by-同舟云学术

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Peculiar properties of preferential sputtering of PbTe, SnTe, and GeTe by Ar+ ion plasma

Published:2018-12 Issue: Volume:88 Page:103-108
ISSN:1369-8001
Container-title:Materials Science in Semiconductor Processing
language:en
Short-container-title:Materials Science in Semiconductor Processing

Author:

Zayachuk D.M.,Slynko V.E.,Csik A.

Funder

European Union

European Regional Development Fund

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference22 articles.

1. Secondary neutral mass spectrometry (SNMS) and its application to depth profile and interface analysis;Oechsner,1984

2. Electron impact (EI) secondary neutral mass spectrometry (SNMS);Kopnarski,2011

3. Elements of sputtering theory;Sigmund,2013

4. L.C. Feldman, J.W. Mayer, Fundamentals of Surface and Thin Film Analysis, North-Holland, 1986.

5. Ion-bombardment-induced composition changes in alloys and compounds;Andersen,1984

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2. Variation of Surface Nanostructures on (100) PbS Single Crystals during Argon Plasma Treatment;Crystals;2022-01-15

3. Transformations of micron-sized PbTe surface structures induced by low energy ions;Journal of Alloys and Compounds;2021-11

4. Sputtering rate of lead, tin and germanium tellurides with low energy argon ions;Computational Problems of Electrical Engineering;2021-04-25

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