An eddy current sensor for end-point detection in chemical mechanical planarization using composition signal filtration and a digital potentiometer
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Published:2024-10
Issue:
Volume:181
Page:108614
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ISSN:1369-8001
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Container-title:Materials Science in Semiconductor Processing
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language:en
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Short-container-title:Materials Science in Semiconductor Processing
Author:
Oh Seungjun,
Kim Eungchul,
An Hyunmo,
Yoon Bo-un,
Jang Kihoon,
Kwon Donghoon,
Cho Wonkeun,
Kim TaesungORCID