Atomistic simulation of influence of laser nano-structured diamond abrasive on the polishing behavior of silicon-Reference-Cited by-同舟云学术

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Atomistic simulation of influence of laser nano-structured diamond abrasive on the polishing behavior of silicon

Published:2020-01 Issue: Volume:105 Page:104706
ISSN:1369-8001
Container-title:Materials Science in Semiconductor Processing
language:en
Short-container-title:Materials Science in Semiconductor Processing

Author:

Dai Houfu,Zhou Yuqi,Zhang Fa

Funder

Guizhou University

Guizhou Province Education Department Youth Science and technology talent growth

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference39 articles.

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2. Microfabricated textured surfaces for super-hydrophobicity investigations;Callies;Microelectron. Eng.,2005

3. Development of cutting tools with microscale and nanoscale textures to improve frictional behavior;Kawasegi;Precis. Eng.,2009

4. A new two-dimensional ultrasonic assisted grinding (2D-UAG) method and its fundamental performance in monocrystal silicon machining;Liang;Int. J. Mach. Tool Manuf.,2010

5. Lapping of single crystal diamond tools;Yuan;CIRP Ann. - Manuf. Technol.,2003

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