Investigation of “fur-like” residues post dry etching of polyimide using aluminum hard etch mask

Author:

Joshi Shivani,Savov Angel,Shafqat Salman,Dekker Ronald

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference23 articles.

1. W. Li, J.-L. Zhang, H.-M. Li, T. Ding, L. Wang, Preparation of ultrafiltration membranes with aromatic polyimide, in: Proceedings of the Fifth International Membrane Science & Technology Conference, Sydney, Australia, 2003, pp. 1–6.

2. Polyimides-thermally Stable Polymers;Bessonov,1987

3. Ghosh, Malay K., and Polyimides, K.L., Mittal K.L., Fundamentals and applications, 1996, Marcel Dekker, New York.

4. Properties of thin polyimide films;Rothman;J. Electrochem. Soc.,1980

5. Recent applications of polyimide to micromachining technology;Frazier;IEEE Trans. Ind. Electron.,1995

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