Influence of the nitrogen fraction on AlN thin film deposited by cathodic arc ion
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference28 articles.
1. Aluminium nitride films deposition by reactive triode sputtering for surface acoustic wave device applications
2. Application of aluminum nitride films for electronic devices
3. Effect of rapid thermal annealing of sputtered aluminium nitride film in an oxygen ambient
4. Design of high frequency piezoelectric resonators utilizing laterally propagating fast modes in thin aluminum nitride (AlN) films
5. Evaporated aluminium nitride encapsulating films
Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. High performance of Ag/AlN/Si Schottky diode: Study of the DC sputtering power effect on its electrical properties;Materials Science and Engineering: B;2024-06
2. AlN coatings with high thermal conductivity and excellent electrical properties for thermal management devices;Ceramics International;2023-06
3. Microstructures and properties of wire-arc additively manufactured 5356 aluminium alloy protected by different proportions of nitrogen and argon;Journal of Materials Science;2021-09-05
4. Microstructure and thermal conductivity of AlN coating on Cu substrate deposited by arc ion plating;Materials Chemistry and Physics;2020-02
5. Fabrication Condition Optimization of AIN Films and Its Nanometer Scale Piezoelectric Properties;Science of Advanced Materials;2018-03-01
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3