Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference18 articles.
1. High resolution patterning on nonplanar substrates with large height variation using electron beam lithography;Ray;J. Vac. Sci. Technol. B, Nanotechnol. Microelectr.: Mater. Proc. Measur. Phenomena,2012
2. A maskless laser-write lithography processing of thin-film transistors on a hemispherical surface;Yoo;Microelectron. Eng.,2010
3. Laser-lithography on non-planar surfaces;Radtke;Opt Express,2007
4. Soft UV-nanoimprint lithography on non-planar surfaces;Farshchian;Microelectron. Eng.,2011
5. Advances in lithography on non-planar surfaces;Radtke;Micro-Optics,2010
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