Enhanced uniformity in electrical and optical properties of ITO thin films using a wide thermal annealing system-Reference-Cited by-同舟云学术

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Enhanced uniformity in electrical and optical properties of ITO thin films using a wide thermal annealing system

Published:2018-06 Issue: Volume:79 Page:14-19
ISSN:1369-8001
Container-title:Materials Science in Semiconductor Processing
language:en
Short-container-title:Materials Science in Semiconductor Processing

Author:

Seong Sejong,Jung Yong Chan,Lee Taehoon,Park In-Sung,Ahn Jinho

Funder

Ministry of Education

Ministry of Science and ICT

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference26 articles.

1. Effects of processing parameters on crystalline structure and optoelectronic behavior;Shakiba;J. Mater. Sci.: Mater. Electron.,2017

2. Effect of growth temperature and coating cycles on structural, electrical, optical properties and stability of ITO films deposited by magnetron sputtering;Xu;Mater. Sci. Semicond. Proc.,2014

3. Substitution mechanism of Ga for Zn site depending on deposition temperature for transparent conducting oxides;Lee;Curr. Appl. Phys.,2012

4. Tin-doped indium oxide films for highly flexible transparent conducting electrodes;Park;Thin Solid Films,2016

5. Improvement of electrical properties of printed ITO thin films by heat-treatment conditions;Hong;Curr. Appl. Phys.,2011

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