Pitch evaluation of gratings based on a digital image correlation technique-Reference-Cited by-同舟云学术

Pitch evaluation of gratings based on a digital image correlation technique

Published:2016-04 Issue: Volume:365 Page:68-75
ISSN:0030-4018
Container-title:Optics Communications
language:en
Short-container-title:Optics Communications

Author:

Lu Yancong,Jia Wei,Wei Chunlong,Yu Junjie,Li Shubin,Li Yanyang,Li Minkang,Qiu Jucheng,Wang Shaoqing,Zhou Changhe

Funder

National Science Foundation

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Physical and Theoretical Chemistry,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference12 articles.

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3. Linewidth measurement of gratings on photomasks – a simple technique;Naqvi;Appl. Opt.,1992

4. Long-range AFM profiler used for accurate pitch measurements;Meli;Meas. Sci. Technol.,1998

5. Scale vs laser interferometers perfomance and comparison of two meauring systems;Kunzmann;Ann. CIRP,1993

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