Preparation of fine amorphous silicon nitride powder in the system SiH4-Ar-NH3

Author:

Sahu Sadananda,Kavecký Štefan,Szépvölgyi János

Publisher

Elsevier BV

Subject

Materials Chemistry,Ceramics and Composites

Reference11 articles.

1. New design concept of structural ceramics, ceramics nanocomposites;Niihra;J. Ceram. Soc. Japan,1991

2. Production and characterization of silicon nitride powders;Schwier,1989

3. Synthesis and characterization of pure silicon nitride powder;Prochazka;Am. Ceram. Soc. Bull.,1978

4. Synthesis of silicon nitride powder by gas phase reaction;Janiga;J. Eur. Ceram. Soc.,1991

5. Factorial experimental investigation of the formation of nitride powder in an RF plasma torch;Szépvölgyi,1993

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1. Kinetics of Silicon Nitridation and the Formation Mechanism of α/β-Si3N4 at Atmospheric Pressure and 1410 °C;Industrial & Engineering Chemistry Research;2022-07-07

2. Mechanisms of Powder Diameter and Thermal Diffusion on the Produced α/β-Si3N4 Proportion;Industrial & Engineering Chemistry Research;2019-11-26

3. Synthesis of carbon-free Si3N4/SiC nanopowders using silica fume;Ceramics International;2011-12

4. PEN/Si3N4 bilayer film for dc bus capacitors in power converters in hybrid electric vehicles;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2011-11

5. ChemInform Abstract: Preparation of Fine Amorphous Silicon Nitride Powder in the System SiH4-Ar-NH3.;ChemInform;2010-08-12

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