Author:
Dearnaley G.,Ing Judith L.,Sugden S.,Brown Ian G.,Godechot X.
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Cited by
4 articles.
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1. Metal ion implantation: Conventional versus immersion;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1994-03
2. Metal ion implantation for large scale surface modification;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1993-07
3. Vacuum arc ion sources for particle accelerators and ion implantation;IEEE Transactions on Plasma Science;1993
4. Versatile high current metal ion implantation facility;Surface and Coatings Technology;1992-04