Control of mechanical and structural properties of coatings deposited using unbalanced magnetrons
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference3 articles.
1. System of Experimental Design;Taguchi,1987
2. The mechanical and tribological properties of titanium nitride coatings formed in a four magnetron closed-field sputtering system
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5. Nano- and Microcrystal Coatings and Their High-Temperature Applications;Advanced Materials;2001-07
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