Thermodynamic analysis and deposition of refractory materials
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference22 articles.
1. Micro-reaction engineering applications of reaction engineering to processing of electronic and photonic materials
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3. Les métaux réfractaires déposés en phase vapeur pour interconnexions dans les circuits intégrés
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