X-ray diffraction determination of texture and internal stresses in magnetron PVD molybdenum thin films
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference8 articles.
1. X-ray macrostress determination on textured material; use of the ODF for calculating the X-ray compliances
2. Compressive stress and inert gas in Mo films sputtered from a cylindrical‐post magnetron with Ne, Ar, Kr, and Xe
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