Author:
Ohl A.,Strobel H.,Röpcke J.,Kammerstetter H.,Pries A.,Schneider M.
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference3 articles.
1. Microwave Discharges: Fundamentals and Applications;Ohl,1993
2. Optical Emission Diagnostic of a Low Pressure Planar Microwave Discharge for Plasmachemical Deposition
3. Proceedings of XXI ICPIG, Bochum;Strobel,1993
Cited by
15 articles.
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