Modification of mechanical properties of nitrogen-sputtered boron nitride films by ion bombardment
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference18 articles.
1. Phase control of cubic boron nitride thin films
2. Ion Assisted Synthesis of Boron Nitride Coatings
3. Growth of cubic boron nitride on Si(100) by neutralized nitrogen ion bombardment
4. Microstructure of cubic boron nitride thin films grown by ion‐assisted pulsed laser deposition
5. Sputter Deposited Boron Nitride: A Review
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