Author:
Qiao Da-Yong,Yuan Wei-Zheng,Li Xiao-Ying
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Biotechnology,Electronic, Optical and Magnetic Materials
Reference9 articles.
1. Extending the travel range of analog tuned electrostatic actuators;Hung;J. Microelectromech. Syst.,1999
2. E.S. Hung, S.D. Senturia, Leverage bending for full gap positioning with electrostatic actuation, in: Proceedings of the Solid State Sensor and Actuator Workshop, Hilton Head, SC, 1998, pp. 98–100.
3. Electrostatic micromechanical actuator with extended range of travel;Chan;J. Microelectromech. Syst.,2000
4. J.I. Seeger, B.E. Boser, Dynamics and control of parallel-plate actuators beyond the electrostatic instability, in: Proceedings of the 10th International Conference on Solid-State Sensors and Actuators(Transducers ‘99), Sendai, Japan, 1999.
5. Current drive methods to extend the range of travel of electrostatic microactuators beyond the voltage pull-in point;Nadal-Guardia;J. Microelectromech. Syst.,2002
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