Analysis of charged device model (CDM) ESD in MEMS
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Biotechnology,Electronic, Optical and Magnetic Materials
Reference29 articles.
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4. Review of device and reliability physics of dielectrics in electrostatically driven MEMS devices;de Groot;IEEE Transactions on Device and Materials Reliability,2009
5. A physical model to predict stiction in MEMS;van Spengen;Journal of Micromechanics and Microengineering,2002
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