Minimizing the torque ripple of variable capacitance electrostatic micromotors-Reference-Cited by-同舟云学术

Minimizing the torque ripple of variable capacitance electrostatic micromotors

Published:2006-06 Issue:6 Volume:64 Page:361-367
ISSN:0304-3886
Container-title:Journal of Electrostatics
language:en
Short-container-title:Journal of Electrostatics

Author:

Behjat V.,Vahedi A.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Biotechnology,Electronic, Optical and Magnetic Materials

Reference17 articles.

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4. L.G. Frechette, S.F. Nagle, R. Ghodsi, S.D. Umaus, M.A. Schmidt, J.H. Lang, An electrostatic induction micromotor supported on gas-lubricated bearings, IEEE 14th International Conference, MEMS 2001, January 2001, Interlaken, Switzerland.

5. Microactuators and micromachines;Fujita;Proc. IEEE,1998

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