Author:
Moosapour Mina,Hajabasi Mohammad Ali,Ehteshami Hossein
Subject
Applied Mathematics,Modelling and Simulation
Reference30 articles.
1. Design and performance test of an oscillation loop for a MEMS resonant accelerometer;Sung;J. Micromech. Microeng.,2003
2. Incaneus, Thermoelastic Damping in Vibrating Beam Accelerometer: A New Thermoelastic Finite Element Approach;Lepage,2006
3. A HARPSS polysilicon vibrating ring gyroscope;Ayazi;J. Microelectromech. Syst.,2001
4. Experimental study of thermoelastic damping in MEMS gyros;Duwel;Sens. Actuators, A,2003
5. Atomic resolution with an atomic force microscope using piezoresistive detection;Tortonese;Appl. Phys. Lett.,1993
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