The influence of oxidizing agents on etching and passivation of silicon in KOH solution
Author:
Publisher
Elsevier BV
Subject
Electrochemistry,General Chemical Engineering
Reference22 articles.
1. All-silicon bistable micromechanical fiber switch based on advanced bulk micromachining
2. Three-dimensional silicon electrostatic linear microactuator
3. All-silicon plate wave oscillator system for sensors
4. Etching of Silicon in NaOH Solutions: I . In Situ Scanning Tunneling Microscopic Investigation of n‐Si(111)
5. Etching of Silicon in NaOH Solutions: II . Electrochemical Studies of n‐Si(111) and (100) and Mechanism of the Dissolution
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1. Catalytic open-circuit passivation by thin metal oxide films of p-Si anodes in aqueous alkaline electrolytes;Energy & Environmental Science;2022
2. Enhanced stability of silicon for photoelectrochemical water oxidation through self-healing enabled by an alkaline protective electrolyte;Energy & Environmental Science;2020
3. Photoanodic pyramid texturization of n-Ge(100) in HCl solution: unexpected anisotropy in the surface chemistry of etching;Journal of Materials Chemistry C;2019
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5. Wet Etching of Silicon;Handbook of Silicon Based MEMS Materials and Technologies;2015
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