1. Silicon as a mechanical material;Petersen;Proc. IEEE,1982
2. Micro-opto-mechanical 2×2 switch for single-mode fibers based on plasma-etched silicon mirror and electrostatic actuation;Marxer;J. Lightwave Technol.,1999
3. Pin-joints, springs, cranks, gears, and other novel micromechanical structures;Fan,1987
4. Electrostatic-comb drive of lateral polysilicon resonators;Tang;Sensors and Actuators,1990
5. A flat high-frequency scanning micromirror;Conant,2000